Method for bonding slider row bars for photolithography process

Details Method for bonding slider row bars for photolithography process Method for bonding slider row bars for photolithography process

2006-10-02

2009-06-02

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S417000, C029S603040, C029S603060, C029S603200, C156S089110, C156S089120, C156S268000, C156S345420, C360S235700, C360S235800, C360S236300, C360S236500, C360S236600, C438S455000, C438S458000, C438S976000, C451S005000, C451S041000

Reexamination Certificate

active

07540077

ABSTRACT:
A method for bonding slider row bars for photolithography process, includes steps of: providing a first carrier plate having a sticky surface; providing slider row bars each having a first surface for forming ABS and an opposite second surface, and securing each slider row bar to the first carrier plate with its first surface facing the sticky surface; providing an encapsulation glue and dispensing it to the second surfaces and gaps between the slider row bars; providing a second carrier plate and attaching it to the second surfaces through the encapsulation glue; irradiating the first carrier plate and the encapsulation glue with ultraviolet light such that the first carrier plate is removed from the slider row bars, and the encapsulation glue is cured to bond the slider row bars with the second carrier plate together.

REFERENCES:
patent: 5516430 (1996-05-01), Hussinger
patent: 6129855 (2000-10-01), Sawada et al.
patent: 6687976 (2004-02-01), Koyama et al.

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