Method for bonding a pellicle to a patterning device and...

Details Method for bonding a pellicle to a patterning device and... Method for bonding a pellicle to a patterning device and...

2006-11-14

2006-11-14

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S053000, C430S005000, C156S060000

Reexamination Certificate

active

07136152

ABSTRACT:
A method is provided to reduce differences between the way in which reticle chucking forces and gravity force act upon the reticle during use and during assembly of the pellicle, and to combine this with a similar reduction concerning pellicle chucking forces and gravity force acting upon the pellicle during bonding to the reticle and during quality control of the pellicle. The shape of the pellicle is measured for control in the same orientation of the pellicle with respect to gravity force as during use of the pellicle, and during bonding the pellicle and the reticle are held in the same way and in the same orientation as during control of the pellicle and use of the reticle in the lithographic apparatus, respectively.

REFERENCES:
patent: 5576125 (1996-11-01), Bih
patent: 5772817 (1998-06-01), Yen et al.
patent: 6727029 (2004-04-01), Wu et al.
patent: 2004/0194556 (2004-10-01), Shu et al.
patent: 2005/0045262 (2005-03-01), Eschbach et al.

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