Method for beam calibration and usage of a calibration body

Details Method for beam calibration and usage of a calibration body Method for beam calibration and usage of a calibration body

2011-08-30

2011-08-30

Punnoose, Roy (Department: 2886)

Optics: measuring and testing

Position or displacement

Reexamination Certificate

active

08009299

ABSTRACT:
The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period PSin the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1with the beam target period P1, which is larger than half of the structure period PS, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections deviate either in the beam target period P1from the structure period PSand/or in the beam target position L1from the position L.

REFERENCES:
patent: 5136169 (1992-08-01), Smith et al.
patent: 5345085 (1994-09-01), Prior
patent: 5434422 (1995-07-01), Iwamoto et al.
patent: 5892230 (1999-04-01), Goodberlet et al.
patent: 6392242 (2002-05-01), Perkins et al.
patent: 6528219 (2003-03-01), Conrad et al.
patent: 7417234 (2008-08-01), Hastings et al.
patent: 2002/0039828 (2002-04-01), Hahmann et al.
patent: 2003/0089863 (2003-05-01), Hirayanagi
PCT International Preliminary Report on Patentability dated Jul. 10, 2007.
PCT International Search Report dated Jan. 17, 2007 for International Application No. PCT/EP2006/00068.
PCT International Search Report dated Jan. 17, 2007 for International Application No. PCT/EP2006/00068.

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