Method for batch fabricating semiconductor devices

Details Method for batch fabricating semiconductor devices Method for batch fabricating semiconductor devices

1974-09-30

1978-07-25

Albritton, C. L.

Electrical resistors

Strain gauge type

29578, 29580, 29583, G01L 122

Patent

active

041032730

ABSTRACT:
A method for batch fabricating semiconductor stress sensors having the semiconductor material diaphragm rigidly joined to a support flange made of the same semi-conducting material. Two processed silicon slices, one to form diaphragms and the other to form support flanges, are rigidly joined. The joined slices are then partitioned to form individual stress sensors.

REFERENCES:
patent: 3139598 (1964-06-01), Ruge
patent: 3401449 (1968-09-01), Shaw
patent: 3417361 (1968-12-01), Heller et al.
patent: 3427708 (1969-02-01), Schutz

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