Method for avoiding die cracking

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Assembly of plural semiconductive substrates each possessing...

Reexamination Certificate

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C438S110000, C257SE21508

Reexamination Certificate

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07811853

ABSTRACT:
Methods directed to avoiding die cracking resulting from die separation are described herein. A method may include providing a substrate including a plurality of dies separated from each other by at least a dielectric material, removing the dielectric material substantially down to the substrate to form gaps between the plurality of dies, and singulating the plurality of dies along the gaps between the plurality of dies.

REFERENCES:
patent: 7417305 (2008-08-01), Jiang et al.
patent: 2005/0266661 (2005-12-01), Li et al.
patent: 2006/0043364 (2006-03-01), Jiang et al.
patent: 2006/0166465 (2006-07-01), Ono
patent: 2006/0246626 (2006-11-01), Jiang et al.

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