Method for automatically identifying semiconductor wafers

Registers – Coded record sensors – Particular sensor structure

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

235463, 369109, G06K 710

Patent

active

045859310

ABSTRACT:
A technique for automatically identifying a semiconductor wafer (30) having bar code identification indicia (32) on the front surface (31) thereof. Reading of the code is achieved by rotating the wafer about an axis (34) perpendicular to its front surface (31); directing a beam of radiant energy (37) at the code (32) along a predetermined direction relative to the front surface (31); and sensing, while rotating the wafer, the reflected radiant energy (39) within a second predetermined angular direction relative to the front surface. The bar code used herein is preferably a modified or "stretched" bar code 39 formed on the front surface of the wafer, and having an aspect ratio (i.e., dimension of a space/dimension of a bar) ranging from 1 to 4 (FIG. 2).

REFERENCES:
patent: 3558899 (1971-01-01), Morgan et al.
patent: 3562536 (1971-02-01), Brunner et al.
patent: 3597045 (1971-08-01), Mathisen
patent: 3720924 (1973-03-01), Aagard
patent: 3876842 (1975-04-01), Bouwhuis
patent: 4010355 (1977-03-01), Roehrman et al.
patent: 4020357 (1977-04-01), Punis
patent: 4082943 (1978-04-01), Jensen et al.
patent: 4147295 (1979-04-01), Nojiri et al.
patent: 4166574 (1979-09-01), Yokoyama
patent: 4239151 (1980-12-01), Enser et al.
patent: 4348803 (1982-09-01), Sasaki
"Code 39.RTM.-Alphanumeric Bar Code Specifications", published Jan., 1982, by Intermec Corporation.
"Bar Code Symbology, Some Observations on Theory and Practice"; David C. Allais; Intermec; Feb. 16, 1982; p. 4.
"Coding and Decoding of Wafers"; B. I. C. F. Van Pul; Solid State Technology; Jun. 1979, pp. 77-79.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method for automatically identifying semiconductor wafers does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for automatically identifying semiconductor wafers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for automatically identifying semiconductor wafers will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-142665

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.