Method for automatically controlling the position of small objec

Details Method for automatically controlling the position of small objec Method for automatically controlling the position of small objec

1977-04-05

1980-05-13

Dobeck, B.

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318561, 250561, G05B 106

Patent

active

042030641

ABSTRACT:
A method for automatically controlling the position of small objects, comprises the steps of moving the object to cause at least a portion of an optical image of the object to be imaged on a photoelectric array which is placed on an image formation plane; sequentially detecting outputs by scanning photoelectric converting elements constituting the photoelectric array; counting, in a digital fashion, the position data of the object based on the above-mentioned outputs to deliver a correction signal for moving the object to a predetermined position; moving the object to a predetermined position according to the correction signal; and checking the position of the object by detecting outputs of respective photoelectric converting elements after completion of the above-mentioned movement step and calculating the positional data of the object.

REFERENCES:
patent: 3466514 (1969-09-01), Brunner et al.
patent: 3555252 (1971-01-01), Garden
patent: 3739247 (1973-06-01), Yamaguchi et al.
patent: 3955072 (1976-05-01), Johannsmeier et al.
patent: 4059787 (1977-11-01), Aimar et al.
Khoury, "2-D Area Array Solid-State Feedback Automatic Wafer Alignment System," Mar. 1975, IBM Technical Disclosure Bulletin, vol. 17, No. 10, pp. 2890-2892.

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