Method for automated cassette handling

Details Method for automated cassette handling Method for automated cassette handling

1987-11-10

1989-10-24

Werner, Frank E.

Material or article handling

Apparatus for moving intersupporting articles into, within,...

Stack forming apparatus

414217, B65G 6502

Patent

active

048758256

ABSTRACT:
An automated cassette handler is disclosed for transporting a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system for integrated circuit processing. The handler is adapted to grip and transport the cassette while positively pushing the wafers into the cassette.

REFERENCES:
patent: 3651957 (1972-03-01), Ball et al.
patent: 4047624 (1977-09-01), Dorenbos
patent: 4343584 (1982-08-01), Hudgins
patent: 4668484 (1987-05-01), Elliott
patent: 4674939 (1987-06-01), Maney et al.
patent: 4815912 (1989-03-01), Maney et al.

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