Method for assessing the number and type of flaws

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36446816, 702 35, 382145, 382149, 3562375, 438 14, 738658, G01N 2188, H01L 2166, G06F 1718

Patent

active

059235543

ABSTRACT:
A method for assessing a number and type of flaws of the present invention includes the steps of: counting the number of flaws existing within a first region surrounded by a first line; and counting the number of flaws existing within a second region located in a periphery of the first region.

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patent: 5617487 (1997-04-01), Yoneyama et al.
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patent: 5664085 (1997-09-01), Morito

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