Metal working – Method of mechanical manufacture – Assembling or joining
Reexamination Certificate
2002-03-25
2003-12-09
Vidovich, Gregory (Department: 3726)
Metal working
Method of mechanical manufacture
Assembling or joining
C029S525010, C029S525110, C411S379000
Reexamination Certificate
active
06658716
ABSTRACT:
BACKGROUND OF THE INVENTION
The invention relates to an auxiliary tool for assembling a motor assembly to support a wafer to be deposited and its assembly method; in particular, the invention relates to an auxiliary tool that can readily assemble the motor assembly.
FIG. 1
a
shows a typical machine for deposition. Four supports
3
are disposed on a base
2
, and support a wafer
1
to be deposited. Each support
3
connects to a bearing
41
along with which can move along in a downward-upward direction.
Referring to
FIG. 1
b,
the base
2
is provided with a plurality of second screw holes
21
. In
FIG. 1
b,
the quantity of the second screw holes
21
is four. The bearing
41
is disposed inside a motor assembly
4
. The motor assembly
4
is provided with a plurality of first screw holes
45
corresponding to the second screw holes
21
, respectively. Four original bolts
42
are provided to screw into the second screw holes
21
after passing through the first screw holes
45
. The motor assembly
4
is mounted to the base
2
by the original bolts
42
penetrating the first screw holes
45
and the second screw holes
21
in order. It is noted that there are four motor assemblies
4
located beneath the base
2
. However, there is only one motor assembly
4
shown in
FIG. 1
b.
Referring to
FIG. 1
c,
the original bolt
42
is provided with a large diameter portion
421
, a small diameter portion
422
and a threaded portion
423
. The large diameter portion
421
supports the motor assembly
4
. The small diameter portion
422
passes through the first screw hole
45
and the second screw hole
21
. The threaded portion
423
screws into the first screw hole
45
and the second screw hole
21
.
Since the motor assembly
4
is mounted beneath the base
2
, and the distance between the motor assembly
4
and the base
2
is too short to assemble easily, the assembly is troublesome. In addition, there are other devices and pipes attached to the base
2
, and thus the assembly space is limited. Furthermore, the whole motor assembly
4
, including a motor
43
, a gear
44
, the bearing
41
and others, has a certain weight; the assembly of the motor assembly
4
is therefore more difficult.
Specifically, to mount the motor assembly
4
to the base
2
, the whole motor assembly
4
must be manually held while the bolt
42
is also manually held. Thus, it is very difficult to align the original bolt
42
with the screw hole
45
,
21
. As a result, assembly speed is difficult to improve.
BRIEF SUMMARY OF THE INVENTION
In view of the disadvantages of the aforementioned conventional assembly method, the invention provides an auxiliary tool for assembling a motor assembly to a wafer-deposition machine for supporting a wafer. The auxiliary tool of this invention facilitates easy and quick assembly of the motor assembly to the wafer-deposition machine.
An aspect of the present invention is directed to an auxiliary tool for assembling a motor assembly to a wafer-deposition machine, wherein the motor assembly includes a plurality of first screw holes and the wafer-deposition machine includes a plurality of second screw holes corresponding to the first screw holes, respectively. The auxiliary tool comprises a plurality of locking members each having a substantially uniform dimension in a longitudinal direction and being configured to be inserted through one of the plurality of first screw holes of the motor assembly with a corresponding one of the plurality of second screw holes of the wafer-deposition machine to align the first screw hole with the corresponding second screw hole. The auxiliary tool further comprises a plurality of supporting members. At least one supporting member is releasably coupled to each of the plurality of locking members to support the motor assembly with respect to the wafer-deposition machine to keep the locking member inserted through the first screw hole and the corresponding second screw hole and to maintain alignment of the first screw hole and the corresponding second screw hole.
In some embodiments, each locking member comprises a cylindrical bolt having a uniform diameter. Each locking member comprises at least one through aperture through which a supporting member releasably passes, wherein the through aperture is nonparallel to the longitudinal direction of the locking member. The through aperture may be substantially perpendicular to the longitudinal direction of the locking member. Each supporting member may comprise a pin.
In specific embodiments, each locking member comprises a pair of through apertures for receiving a pair of supporting members. The pair of through apertures include a first through aperture configured to be disposed on a first side of the motor assembly and the wafer-deposition machine and a second through aperture configured to be disposed on a second side of the motor assembly and the wafer-deposition machine opposite from the first side, after the locking member is inserted through the first screw hole of the motor assembly and the corresponding second screw hole of the wafer-deposition machine. Each locking member may have a threaded portion at at least one of two ends.
In accordance with another aspect of the present invention, a method for assembling a motor assembly to a wafer-deposition machine comprises disposing the motor assembly adjacent to the deposition machine. At a first location, a locking member is inserted through one of the plurality of first screw holes of the motor assembly and a corresponding one of the plurality of second screw holes of the wafer-deposition machine to align the first screw hole with the corresponding second screw hole at the first location. At least one supporting member is releasably coupled to the locking member to support the motor assembly with respect to the wafer-deposition machine to keep the locking member inserted through the first screw hole and the corresponding second screw hole and to maintain alignment of the first screw hole and the corresponding second screw hole at the first location. At each of one or more remaining locations, an attachment bolt is inserted through another one of the plurality of first screw holes of the motor assembly and a corresponding one of the plurality of second screw holes of the wafer-deposition machine to align the first screw hole with the corresponding second screw hole and to fasten the motor assembly to the wafer-deposition machine at each of the one or more remaining locations. The at least one supporting member and the locking member are removed at the first location. At the first location, another attachment bolt is inserted through the first screw hole of the motor assembly and the corresponding second screw holes of the wafer-deposition machine to align the first screw hole with the corresponding second screw hole and to fasten the motor assembly to the wafer-deposition machine at the first location.
In some embodiments, another locking member is inserted through one of the plurality of first screw holes of the motor assembly and a corresponding one of the plurality of second screw holes of the wafer-deposition machine to align the first screw hole with the corresponding second screw hole at a second location, prior to inserting the attachment bolt at each of one or more remaining locations. At least one supporting member is releasably coupled to the locking member at the second location to support the motor assembly with respect to the wafer-deposition machine to keep the locking member inserted through the first screw hole and the corresponding second screw hole and to maintain alignment of the first screw hole and the corresponding second screw hole at the second location. After inserting the attachment bolt at each of the remaining locations, the at least one supporting member and the locking member are removed at the second location. At the second location, another attachment bolt is inserted through the first screw hole of the motor assembly and the corresponding second screw holes of the wafer-deposition machine to align
Fan Ching-Shun
Hu Wen-Kan
Liang Li-Chun
Tai Zhi-Zhao
Cozart Jermie E.
Mosel Vitelic Inc.
Townsend and Townsend / and Crew LLP
Vidovich Gregory
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