Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
Reexamination Certificate
2005-01-11
2005-01-11
Leung, Quyen (Department: 2828)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
C372S046012
Reexamination Certificate
active
06841407
ABSTRACT:
A method for aperturing a vertical-cavity surface-emitting laser (VCSEL), for increasing the external quantum efficiency and decreasing the threshold current, involves an etching mixture that is applied to the active region of the VCSEL. The etching mixture is designed in a manner to selectively etch the active region of the VCSEL at a rate substantially faster than the etch rate of at least one of the multiple DBRS associated with the VCSEL.
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Almuneau Guilhem
Coldren Larry A.
Hall Eric M.
Nakagawa Shigeru
Berman, Esq. Charles
Greenberg & Traurig, LLP
Leung Quyen
The Regents of the University of California
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