Method for annealing thin film superconductors

Details Method for annealing thin film superconductors Method for annealing thin film superconductors

1994-05-05

1996-06-18

King, Roy V.

Superconductor technology: apparatus, material, process

Processes of producing or treating high temperature...

Utilizing electromagnetic wave energy, ion, or plasma

505500, 505501, 505238, 505451, 505729, 505742, 427 62, 427553, 427554, 427559, H01L 3924, B05D 306

Patent

active

055277675

ABSTRACT:
There is disclosed a method for annealing oxide thin film superconductors having layered structures including at least Cu--O layers in which each oxide thin film superconductor is heated partially by a heating means and the heating portion is moved at a predetermined speed.

REFERENCES:
Matsushima et al, "Structure and Superconducting Properties of Bi--Sr--Ca--Cu--O Thin Films Annealed at Low Temperatures", Jpn. J. Appl. Phys. 28(1) Jan. 1989 pp. L97-L99.
Aizaki et al, "YBa.sub.2 Cu.sub.3 O.sub.y superconducting thin film obtained by laser annealing", Jpn. J. Appl. Phys. 27(2) Feb. 1988 pp. L231-233.
JP 1-220874 (A) T. Matsumoto, published on Sep. 4, 1989 "Treatment of oxide superconductor thin film".
JP 1-220875 (A) T. Matsumoto, published on Sep. 4, 1989 "Treatment of oxide superconductor thin film".
JP 1-220876 (A) H. Tsuge, published on Sep. 4, 1989 "Writing of oxide superconductor film".
Applied Physics A, Solids and Surfaces, vol. 46, Aug. 1988, pp. 331-334, Berlin, DE; G. Liberts et al.: "Direct laser writing of superconducting patterns into semiconducting Y-Ba-Cu-O" *p. 331, paragraph 2; p. 333, pargraphs 5-6*.
Japanese Journal Of Applied Physics, vol. 26, No. 10, Oct. 1987, p. L1731-L1733, Tokyo, JP; K. Murakami et al.: "Energy beam irradiation of of high-Tc superconductors YlBa2Cu307-y and H01Ba2Cu307-y" *p. L1731, paragraphs 1-3*.
Extended Abstracts of the 20th Conference on Solid State Devices and Materials, Aug. 1988, pp. 435-438, Tokyo, JP; Y. Yonezawa et al.: "Preparation of high Tc oxide superconducting films by laser annealing" *p. 435, full page; p. 437, right-hand column; p. 438, full page*.
Japanese Journal of Applied Physics, vol. 28, No. 11, Nov. 1989, pp. 2211-2218, Tokyo, JP; S. Otsubo et al.: "Crystallization induced by laser irradiation in Ba-Y-CU-O superconducting films prepared by laser ablation" * p. 2211, par. 2-3; p. 2212, Fig. 1; p. 2213, par. 2-3; p. 2214, par. 6-7; p. 2215, par. 6; p. 2218, par. 2*.
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Levinson et al, "Laser zone-melted Bi-Sr-Ca-Cu-O thick films" Appl. Phys. Lett. 55(16) Oct. 1989 pp. 1683-1685.
LaGraff et al, "Magnetic and Structural properties of YBa.sub.2 Cu.sub.3 O.sub.7-x Fe.sub.y as prepared by a NF.sub.3 gas anneal," Phys. Rev. B, vol. 39(1) Jan. 1989 pp. 347-355.
Tsuruoka et al, "Y-Ba-Cu-O film Growth by OMCVD using N.sub.2 O", Jpn. J. Appl. Phys. 28(10) Oct. 1989 L1800-1802.
Smith et al, "Silicon-on-insulator by graphoepitaxy and zone-melting recrystallization of patterned films," J. Cryst. Growth 63 (1983) pp. 527-546.
Miaoulis et al, "Zone-melting processing of thick high-Tc superconducting films", J. Of Physics D: Applied Physics v. 22 N. 6, Jun. 1989 pp. 864-867.
Givargizov et al, "Production of Superconducting Y-Ba-Cu-O films," Pisma Zh. Tekh. Fiz, (USSR) vol. 14, No. 7-8, Apr. 1988 pp. 677-679.

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