Method for analyzing solid specimen and apparatus therefor

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G01N 104

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active

058441492

ABSTRACT:
A method for analyzing a solid specimen comprises the steps of: preparing a pulsed laser beam having a frequency of at least 100 Hz and a half width of 1 .mu.sec or less; determining a laser irradiation region; irradiating the pulsed laser beam in an inert gas stream and vaporizing a part of the solid specimen to generate fine particles; transferring said fine particles to a detector; and performing elemental analysis in the detector. An apparatus comprises: laser oscillating device including a semiconductor laser; converging device for converging a laser beam; irradiating device for irradiating the converged laser beam to generate fine particles; an analyzer for performing elemental analysis; and transfer device for transferring the fine particles to said analyzer.

REFERENCES:
patent: 4243887 (1981-01-01), Hillenkamp et al.
patent: 5304357 (1994-04-01), Sato et al.
patent: 5351251 (1994-09-01), Hodgson
patent: 5452070 (1995-09-01), Mochizuki et al.
*English language Abstract of No. 7-72047, Japan, Mar., 1995.

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