Method for analyzing membrane structure and apparatus therefor

Details Method for analyzing membrane structure and apparatus therefor Method for analyzing membrane structure and apparatus therefor

2007-07-24

2007-07-24

Glick, Edward J. (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

C378S083000

Reexamination Certificate

active

10958249

ABSTRACT:
A method and apparatus for analyzing a membrane structure by fitting simulated operation data to measured data obtained by X-ray reflectivity measurement to analyze the membrane structure. The analysis result obtained by the fitting can be prevented from falling into a local solution, so as to obtain an analysis result of the membrane structure with high accuracy. The method for analyzing a membrane structure for analyzing a structure of a membrane specimen having a single layer membrane or a multi-layer membrane by an X-ray reflectivity measurement, includes a step of simultaneously analyzing plural pieces of measured data obtained by measuring the membrane specimen under plural sets of measuring conditions different from each other in at least one of a resolution and a dynamic range.

REFERENCES:
patent: 6025596 (2000-02-01), Shirai et al.
patent: 6907107 (2005-06-01), Wallis et al.
patent: 2002/0150208 (2002-10-01), Yokhin et al.
patent: 9-105726 (1997-04-01), None

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