Method for analyzing manufacturing data

Details Method for analyzing manufacturing data Method for analyzing manufacturing data

2007-02-06

2007-02-06

Paladini, Albert W. (Department: 2125)

Data processing: structural design, modeling, simulation, and em

Modeling by mathematical expression

C700S108000, C702S084000

Reexamination Certificate

active

10135383

ABSTRACT:
A method of manufacturing, e.g., integrated circuits, and of managing a manufacturing process. Product unit (circuit) variation data is collected from clustered product units (wafer sites). Collected data is grouped according to a selected manufacturing parameter. Each group is normalized for the selected manufacturing parameter. Normalized groups are combined. Normalized process data is checked for variances and the data is regrouped and renormalized until variances are no longer found. Each identified variance is correlated with a likely source. Then, each said likely source is addressed, e.g., a tool is adjusted or replaced, to minimize variances.

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