Chemistry: analytical and immunological testing – Process or composition for determination of physical state... – Corrosion resistance or power
Reexamination Certificate
2005-05-23
2009-10-13
Griffin, Walter D (Department: 1797)
Chemistry: analytical and immunological testing
Process or composition for determination of physical state...
Corrosion resistance or power
C436S005000
Reexamination Certificate
active
07601538
ABSTRACT:
This method for analyzing impurity includes: a step of immersing each of sets of two evaluation silicon wafers into a washing solution, thereby contaminating the evaluation silicon wafers to be in a same state of contamination; a step of dissolving each of a surface layer portion of either one of the evaluation silicon wafers and a bulk portion of the other evaluation silicon wafer with solutions including hydrofluoric acid respectively, and measuring a concentration of impurities included in each of the solutions; a step of determining a calibration curve that shows a relation between the concentrations of the impurities in the surface layer portions and the concentrations of the impurities in the bulk portions of the evaluation silicon wafers; a step of dissolving a surface layer portion of a silicon wafer of a test object with a solution including hydrofluoric acid, and measuring a concentration of impurities included in the solution; and a step of determining a concentration of impurities in a bulk portion based on the calibration curve using the measured concentration of the impurities.
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Machine Translation of JP 11-330043, Masaki, Evaluation of Silicon Wafer, 1999.
Shabani Mohammad B.
Shiina Yoshikazu
Griffin Walter D
Mui Christine T
Pillsbury Winthrop Shaw & Pittman LLP
Sumco Corporation
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