Chemistry: analytical and immunological testing – Halogen containing
Patent
1989-03-31
1991-05-21
Lacey, David L.
Chemistry: analytical and immunological testing
Halogen containing
436133, 436136, 423241, G01N 3300
Patent
active
050174991
ABSTRACT:
The concentration of molecular fluorine in a mixed gas such as an excimer laser gas can be determined easily, quickly and accurately by passing the mixed gas through a column packed with an alakli metal or alkaline earth metal compound which has no halogen atom and reacts with fluorine to form a solid fluoride together with molecular oxygen and/or carbon dioxide and measuring the concentration of oxygen or carbon dioxide in the fluorine-free gas flowed out of the packed column. If the mixed gas initially contains molecular oxygen or carbon dioxide, its concentration is measured separately after fixing fluorine in another column packed with an element which forms a fluoride. This analyzing method can be used in a feedback control system for controlling the concentration of fluorine in an excimer laser gas during operation of the laser to thereby stabilize the laser output power.
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Aramaki Minoru
Hakuta Kohzo
Kodama Mitsuo
Nakagawa Shinsuke
Nakano Hisaji
Central Glass Company Limited
Lacey David L.
Snay Jeffrey R.
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