Method for analyzing defects in a semiconductor

Details Method for analyzing defects in a semiconductor Method for analyzing defects in a semiconductor

1996-03-20

1999-11-30

Nguyen, Vinh P.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324 731, 3241581, G01R 3128

Patent

active

059949139

ABSTRACT:
In order to verify whether defects generated when the manufacturing process is in progress results in the electric failures during the operation of the devices, and to verify which process the defects which cause electric failures are generated in, there is provided a method for analyzing defects in a semiconductor device, including the steps of: measuring the positions of physical defects generated in each process; converting the positions of said the physical defects into logic row/column address data; and comparing said logic row/column address data converted from positions of said physical defects with electric failure data which are measured after the overall processes are completed.

REFERENCES:
patent: 4659220 (1987-04-01), Bronte et al.
patent: 4697245 (1987-09-01), Kara et al.
patent: 4794647 (1988-12-01), Forgues et al.
patent: 4965515 (1990-10-01), Karasawa
patent: 5125040 (1992-06-01), Matsui et al.

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