Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1999-06-30
2000-07-11
Kim, Robert H.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356 355, G01B 902
Patent
active
060881011
ABSTRACT:
A deformable structure is subjected to a plurality of reduced pressures, causing a bulge in the surface of the deformable structure above a separation in the deformable structure. The cross sectional area of the bulge is measured for each reduced pressure in a plane parallel to the surface of the deformable structure. When the cross sectional area of the bulge does not increase with a reduction in the pressure, the cross sectional area of the bulge approximates the area of the separation. The depth of the separation is calculated using the change in cross sectional area of the bulge per change in pressure.
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Csontos Alan A.
Farrell Martin
Kim Robert H.
Michelin North America, Inc.
Reed Robert R.
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