Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate
2004-03-19
2008-12-02
Nghiem, Michael P (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Mechanical measurement system
C702S158000, C356S237200
Reexamination Certificate
active
07460962
ABSTRACT:
The invention relates to a method for optical measurement of an OPC structure (306), having a pre-determined structure (302) on a photo-mask, in order to determine a measurement of the structure in at least one direction, whereby, firstly, a region (300) is determined on the photo-mask, which comprises the OPC structure (306) to be measured. The intensity of the determined region (300) is then scanned in a first direction and the region in which the intensity passes a threshold is determined for each scan. The maximum separation between an edge (308) of the structure (302) and an edge (312) of the corresponding OPC structure (306) is determined, based on the difference of the determined regions.
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Brueck Hans-Juergen
Scheuring Gerd
Glenn Michael A.
Glenn Patent Group
Muetec Automatisierte Mikroskopie und Messtecknik GmbH
Nghiem Michael P
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