Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2005-07-12
2005-07-12
Mehta, Bhavesh M. (Department: 2625)
Image analysis
Applications
Manufacturing or product inspection
C348S095000, C250S491100, C250S559300
Reexamination Certificate
active
06917698
ABSTRACT:
Disclosed is a case where an aligning method according to the present invention is applied to a probe apparatus. Target probes are photographed by an upper CCD camera and target electrode pads are photographed by a lower CCD camera. Second virtual images of the photographed probes and first virtual images of the electrode pads are displayed in second and first image data areas on a monitor screen. Dark and light colors in terms of brightness are applied to pixels of the second virtual image and the first virtual image. The second virtual images are moved on the monitor screen, so that the second virtual images are superimposed on the first virtual images. The total sum of the brightness (luminance) of all the first virtual images is calculated. On the basis of the calculated luminance value, a position where the target probes are most successfully brought into contact with the target pads is detected.
REFERENCES:
patent: 6002426 (1999-12-01), Back et al.
patent: 59-17260 (1984-01-01), None
patent: 5-13518 (1993-01-01), None
Mehta Bhavesh M.
Strege John
Tokyo Electron Limited
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