Method for aligning thin film head pole tips

Details Method for aligning thin film head pole tips Method for aligning thin film head pole tips

1990-11-06

1992-02-04

Hall, Carl E.

Metal working

Method of mechanical manufacture

Electrical device making

427131, 427132, G11B 542

Patent

active

050849573

ABSTRACT:
A thin film magnetic read/write head is manufactured using Al.sub.2 O.sub.3 dams. The Al.sub.2 O.sub.3 dams are formed using a sacrificial layer which is deposited upon a bottom pole layer. An Al.sub.2 O.sub.3 layer is deposited over the sacrificial layer. When the sacrificial layer is removed, the Al.sub.2 O.sub.3 layer forms dams between which a top pole piece is deposited. The sacrificial layer is removed using lapping and a selected chemical etch; partial lapping or chemical etch followed by chemical etch of the sacrificial layer which lifts-off overlying Al.sub.2 O.sub.3 ; depositing photoresist dams and chemically etching the encapsulation layer and the sacrificial layer; or removal through physical or thermal shock of the Al.sub.2 O.sub.3 layer sputtered at zero bias followed by a selective chemical etch of the sacrificial layer.

REFERENCES:
patent: 4839197 (1989-06-01), Henderson
patent: 4949207 (1990-08-01), Lazzari
patent: 4970615 (1990-11-01), Gau
patent: 4970616 (1990-11-01), Ramaswamy
patent: 4992901 (1991-02-01), Keel et al.
Yamaha Corporation, Japan, Yamaha Thin Film Head, Sep. 1989.

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