Optics: measuring and testing – By polarized light examination – With birefringent element
Patent
1991-01-08
1991-10-08
Turner, Samuel
Optics: measuring and testing
By polarized light examination
With birefringent element
356153, 356360, G01B 902
Patent
active
050549251
ABSTRACT:
In an interferometer alignment system comprising an interferometer having a plurality of movable elements (78) alignable with respect to an optical axis, a source of radiant energy (1) for the interferometer, means (9, 13) for providing a measurement wavefront (10 M) and a reference wavefront (10 R) from the radiant energy (1), and means (5, 14) for collecting the measurement and reference wavefronts and focusing them as spots (15 R, 15 M); the improvement comprising a camera (18) having a photosensitive surface (29); means (17) for imaging the focused spots (15 R, 15 M) onto the photosensitive surface (29) of the camera (18), the camera (18) providing an output signal (19, 20, 21) based on the imaged spots (15 R, 15 M); means for providing the output signal (19) to a video type monitor (25) for enabling a display (24) of the imaged spots on the monitor (25); means for processing (22) the output signal (21) for providing a set of corresponding coordinates for the displayed imaged spots (30 R, 30 M); means for defining a camera pixel corresponding to the interferometer optical axis (27); means for providing a display of the corresponding coordinates relative to the defined camera pixel (27) on the monitor (25); means responsive to the provided corresponding coordinates for providing a control signal (26) proportional to the coordinates; and means responsive to the control signal (26) for enabling movement of the elements until the coordinates correspond to the defined camera pixel.
REFERENCES:
patent: 4201473 (1980-05-01), Domenicali et al.
patent: 4772123 (1988-09-01), Radnea
Turner Samuel
Zygo Corporation
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