Method for aligning a semiconductor device

Details Method for aligning a semiconductor device Method for aligning a semiconductor device

1994-06-30

1996-09-17

Picardar, Kevin M.

Fishing, trapping, and vermin destroying

437211, 437214, 437217, 437218, H01L 2160

Patent

active

055568084

ABSTRACT:
A system and method for aligning a semiconductor device (10) to a fixture (11) is provided. A first physical alignment feature (12) on the semiconductor device (10) and a second physical alignment (24) on the fixture (11) mate to align and hold the semiconductor device (10) in place. In one embodiment the physical alignment features (12) and (24) are produced using standard photolithography techniques, resulting in precise alignment features. In another embodiment the physical alignment features (12) and (24) are designed and placed to control the direction the thermal expansion of the semiconductor device (10) relative to the fixture (11).

REFERENCES:
patent: 5150193 (1992-09-01), Yasuhara et al.
patent: 5260599 (1993-11-01), Ponse et al.
patent: 5283205 (1994-02-01), Sakamoto
patent: 5360761 (1994-11-01), Andrews
patent: 5381047 (1995-01-01), Kanno
patent: 5408131 (1995-04-01), Khatri et al.
patent: 5475775 (1995-12-01), Kragl et al.

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