Method for aligning a loadport to an overhead hoist...

Details Method for aligning a loadport to an overhead hoist... Method for aligning a loadport to an overhead hoist...

2007-08-28

2007-08-28

Brahan, Thomas J. (Department: 3654)

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

C033S645000

Reexamination Certificate

active

10127111

ABSTRACT:
A method for aligning a loadport of a process machine to an overhead hoist transport (OHT) system which can be carried out by first providing an OHT rail overhanging a cleanroom floor; setting a reference point in the cleanroom in proximity to the OHT rail; marking on the cleanroom floor boundary reference lines for each row of process machines based on the reference point; positioning a process machine on the cleanroom floor with a boundary line of the machine aligned to the boundary reference line; mounting a loadport onto the process machine; and fine tuning a center line of the loadport to a reference line on the floor that is 200 mm apart from and parallel to the boundary reference line.

REFERENCES:
patent: 5655869 (1997-08-01), Scheler et al.
patent: 6065217 (2000-05-01), Dong
patent: 6092678 (2000-07-01), Kawano et al.
patent: 6138721 (2000-10-01), Bonora et al.
patent: 6163373 (2000-12-01), Ohtomo et al.
patent: 6256895 (2001-07-01), Akers
patent: 6453574 (2002-09-01), Chen

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