Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate
2006-04-05
2008-10-07
Chowdhury, Tarifur R. (Department: 2886)
Optics: measuring and testing
Shape or surface configuration
Reexamination Certificate
active
07433057
ABSTRACT:
A system comprising a plurality of methods for measuring surfaces or wavefronts from a test part with greatly improved accuracy, particularly the higher spatial frequencies on aspheres. These methods involve multiple measurements of a test part. One of the methods involves calibration and control of the focusing components of a metrology gauge in order to avoid loss of resolution and accuracy when the test part is repositioned with respect to the gauge. Other methods extend conventional averaging methods for suppressing the higher spatial-frequency structure in the gauge's inherent slope-dependent inhomogeneous bias. One of these methods involve averages that suppress the part's higher spatial-frequency structure so that the gauge's bias can be disambiguated; another method directly suppresses the gauge's bias within the measurements. All of the methods can be used in conjunction in a variety of configurations that are tailored to specific geometries and tasks.
REFERENCES:
patent: 5357341 (1994-10-01), Kuchel et al.
patent: 5926781 (1999-07-01), Scott
patent: 6061133 (2000-05-01), Freischlad
patent: 6643024 (2003-11-01), Deck et al.
patent: 6804011 (2004-10-01), Kuechel
patent: 6956657 (2005-10-01), Golini et al.
J.C. Wyant, “Absolute Optical Testing: Better Accuracy Than the Reference”, Photonics Spectra, p. 97-101, (Mar. 1991).
C. J. Evans and R. E. Parks, “Absolute Testing of Spherical Optics,” Optical Fabrication and Testing Workshop, OSA Technical Digest , Series 13, p. 185-187, (1994).
P. Murphy, J. Fleig, G. Forbes and P. Dumas, “Novel Method for Computing Reference Wave Error in Optical Surface Metrology,” SPIE vol. TD02, p. 138-140, (2003).
DeVries Gary M.
Fleig Jon F.
Forbes Greg W.
Miladinovic Dragisha
Murphy Paul E.
Akanbi Isiaka O
Brown Robert C.
Chowdhury Tarifur R.
QED Technologies International, Inc.
Slifkin Neal L.
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