Method for absolutely measuring the diffraction grating spacing

Details Method for absolutely measuring the diffraction grating spacing Method for absolutely measuring the diffraction grating spacing

1998-01-07

1999-10-26

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356356, G01B 902

Patent

active

059737867

ABSTRACT:
A method of absolutely measuring the diffraction grating spacing and apparatus thereof, which solves the disadvantages of conventional techniques for measuring the diffraction grating spacing, and provides a method utilizing a new laser diffractometer capable of transferring the meter standard to the nanometer region. The invention comprises a first method which utilizes a wavelength stable laser for generating a stable laser beam of wavelength .lambda., 0th and 1st order diffracted beams diffracted at the diffraction grating, and a precision rotary encoder; and a second method utilizing two wave lengths .lambda..sub.1, .lambda..sub.2 of the wavelength stable laser, 0th and 1st order diffracted beams, and a precision rotary encoder.

REFERENCES:
Diffractometric Methods for Absolute Measurement of Diffraction-Grating Spacings (Jan. 15, 1999, vol. 24, No. 2, Optics Letters).

Affiliated with

Also associated with

Rating

Method for absolutely measuring the diffraction grating spacing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for absolutely measuring the diffraction grating spacing , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for absolutely measuring the diffraction grating spacing will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-770579