Method for a reactive surface treatment of a workpiece and a tre

Details Method for a reactive surface treatment of a workpiece and a tre Method for a reactive surface treatment of a workpiece and a tre

1993-05-25

1995-06-06

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

427569, 156345, 118715, 216 58, 216 67, C23C 1600

Patent

active

054221390

ABSTRACT:
A method for a reactive surface treatment of a workpiece, according to which a treatment gas is let out of at least one infeed opening into a treatment chamber and is drawn off said treatment chamber through at least one draw off opening, which openings are arranged adjacent of each other over and across the area to the surface to be treated and feature axes of the openings which extend at least approximately perpendicularly to the surface to be treated. The treatment chamber further includes a support for positioning of the workpiece in such a manner that at least one infeed opening which is connected to a gas delivery device for a treatment gas and at least one draw off opening which is connected to a gas draw off device are located opposite the surface of the positioned workpiece.

REFERENCES:
patent: 4209357 (1980-06-01), Gorin et al.
patent: 4590042 (1986-05-01), Drage
patent: 4780169 (1988-10-01), Stark et al.
patent: 4820371 (1989-04-01), Rose
patent: 4870923 (1989-10-01), Sugimoto

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