Method, device, computer-readable storage medium and...

Details Method, device, computer-readable storage medium and... Method, device, computer-readable storage medium and...

2006-04-11

2006-04-11

Hoff, Marc S. (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C702S117000, C702S182000, C700S110000, C700S121000

Reexamination Certificate

active

07027943

ABSTRACT:
In the case of the method for the computer-aided monitoring of process parameters of a manufacturing process of a physical object, object data which identify the physical object are assigned to various hierarchical levels, object data of various hierarchical levels are grouped to form hierarchical object data records, limit values for at least one process parameter are stored and respectively assigned to a hierarchical object data record, process data of the at least one process parameter, measured during the manufacture of physical objects, are stored and the hierarchical object data records corresponding to the object data are determined for physical objects manufactured.

REFERENCES:
patent: 5586041 (1996-12-01), Mangrulkar
patent: 5726920 (1998-03-01), Chen et al.
patent: 6700950 (2004-03-01), Pellegrini et al.
patent: 2002/0055194 (2002-05-01), Takanabe
patent: 2 283 116 (1995-04-01), None
Copy of European Search Report dated Mar. 10, 2004 for European Patent Application No. 03026035.
C. Schneider et al., “Automated Photolithography Critical Dimension Controls In a Complex, Mixed Technology, Manufacturing Fab”, IBM Microelectronics, 2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.

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