Method, computer program product and apparatus for...

Details Method, computer program product and apparatus for... Method, computer program product and apparatus for...

2005-04-12

2005-04-12

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000, C702S184000

Reexamination Certificate

active

06879866

ABSTRACT:
A method of scheduling one or more maintenance actions in at least a part of a substrate processing system is provided. According to an embodiment, the method includes determining a gap in the flow of substrates in a part of the substrate processing system and scheduling one or more maintenance actions to be performed in another part of the substrate processing during a period associated with the gap. An increase of productivity of substrate processing can be achieved through a reduction in downtime in a substrate processing system by appropriate scheduling of maintenance actions.

REFERENCES:
patent: 6368985 (2002-04-01), Wakamiya et al.
patent: 6436609 (2002-08-01), Park
patent: 20020103563 (2002-08-01), Izawa et al.
patent: 20030013213 (2003-01-01), Takano

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