Method, computer program, apparatus and system providing...

Details Method, computer program, apparatus and system providing... Method, computer program, apparatus and system providing...

2011-06-28

2011-06-28

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S070000

Reexamination Certificate

active

07969554

ABSTRACT:
A method able to provide illumination source parameters for illumination of a lithographic mask in order to project a three-dimensional image into a resist system. Source intensities of incident beams are determined using a near linear program and responsive to an allowed range of variation. Computer program, apparatus and system are detailed and variations are described.

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