Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2007-07-27
2011-11-08
Rachuba, Maurina (Department: 3727)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S285000, C451S287000, C451S289000
Reexamination Certificate
active
08052504
ABSTRACT:
The present embodiment provides for methods and systems for use in processing objects such as wafers, including polishing and/or grinding wafers. Some embodiments provide systems that include a front-end module and a processing module. The front end module couples with a storage device that stores objects for processing. The front-end module can comprise a single robot, a transfer station, and a plurality of end effectors. The processing module is coupled with the front-end module such that the single robot delivers objects from the storage device to the processing module. The processing module comprising a rotating table, and a spindle with a carrier configured to retrieve the delivered object and process the object on the rotating table.
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Halley Dave
Kalenian William J.
Walsh Tom
Lebens Thomas F.
Rachuba Maurina
Sinsheimer Juhnke Lebens & McIvor LLP
Strasbaugh
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