Method, apparatus and computer product for substrate processing

Details Method, apparatus and computer product for substrate processing Method, apparatus and computer product for substrate processing

2006-09-26

2006-09-26

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

With developing

C355S053000, C396S611000, C118S696000, C118S697000, C118S698000, C700S121000

Reexamination Certificate

active

07113253

ABSTRACT:
A method, apparatus and computer product for processing of substrates in at least a part of a substrate processing system is provided. In an embodiment, the method includes obtaining, using a processing unit, at least one of a rate of processing and a time of processing of a plurality of substrate lots to be introduced into a part of the substrate processing system and determining, using the processing unit, an order of introduction of the plurality of substrate lots into the part of the substrate processing system to at least one of increase the rate of processing and decrease the time of processing of the plurality of substrate lots.

REFERENCES:
patent: 5668733 (1997-09-01), Morimoto et al.
patent: 6268900 (2001-07-01), Iwatsu
patent: 6799910 (2004-10-01), Tateyama
patent: 2002/0155727 (2002-10-01), Narita et al.

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