Method and vessel for the delivery of precursor materials

Fluid handling – Processes – Affecting flow by the addition of material or energy

Reexamination Certificate

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Details

C137S268000, C137S345000, C422S129000

Reexamination Certificate

active

10902778

ABSTRACT:
Vessel and method for the production and delivery of a precursor-containing fluid stream comprising the gaseous phase of a precursor material are disclosed herein. In one aspect, there is provided an vessel comprising: an interior volume wherein the interior volume is segmented into an upper volume and a lower volume wherein the upper volume and the lower volume are in fluid communication; a lid comprising a fluid inlet, a fluid outlet, an optional fill port, and an internal recess wherein at least a portion of the upper volume resides within the internal recess; a sidewall interposed between the lid and a base; and at least one protrusion that extends into the lower volume wherein the precursor is in contact with the at least one protrusion and wherein at least one protrusion extends from at least one selected from the lid, the sidewall, the base, and combinations thereof.

REFERENCES:
patent: 4723967 (1988-02-01), Tom
patent: 4916828 (1990-04-01), Yamane et al.
patent: 4947790 (1990-08-01), Gärtner et al.
patent: 5019423 (1991-05-01), Hiai et al.
patent: 5227340 (1993-07-01), Pintchovski et al.
patent: 5276585 (1994-01-01), Smithers
patent: 5377429 (1995-01-01), Sandhu et al.
patent: 5381605 (1995-01-01), Krafft
patent: 5562132 (1996-10-01), Siegele et al.
patent: 5674574 (1997-10-01), Atwell et al.
patent: 5707424 (1998-01-01), Tom et al.
patent: 5953634 (1999-09-01), Kajita et al.
patent: 5989305 (1999-11-01), Ohsaki et al.
patent: 6058012 (2000-05-01), Cooper et al.
patent: 6077356 (2000-06-01), Bouchard
patent: 6089184 (2000-07-01), Kaizuka et al.
patent: 6202591 (2001-03-01), Witzman et al.
patent: 6244331 (2001-06-01), Budelman
patent: 6424800 (2002-07-01), Kim
patent: 6444038 (2002-09-01), Rangarajan et al.
patent: 6470144 (2002-10-01), Tarutani et al.
patent: 6520218 (2003-02-01), Gregg et al.
patent: 6581649 (2003-06-01), Jursich
patent: 6840252 (2005-01-01), Zorich et al.
patent: 6909839 (2005-06-01), Wang et al.
patent: 2002/0078894 (2002-06-01), Timmons et al.
patent: 2003/0111014 (2003-06-01), Donatucci et al.
patent: 2003/0121608 (2003-07-01), Chen et al.
patent: 2003/0232138 (2003-12-01), Tuominen et al.
patent: 2004/0013577 (2004-01-01), Ganguli et al.
patent: 2004/0016404 (2004-01-01), Gregg et al.
patent: 2004/0025370 (2004-02-01), Guenther
patent: 2004/0083963 (2004-05-01), Dando et al.
patent: 2004/0083965 (2004-05-01), Wang et al.
patent: 6 032695 (1994-02-01), None
patent: 2003/318170 (2003-11-01), None
patent: 2003/332243 (2003-11-01), None
patent: WO 01/42539 (2001-06-01), None
patent: WO 03/052160 (2003-06-01), None
patent: WO 2004/007793 (2004-01-01), None

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