Method and test structure for determining resistances at a...

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters

Reexamination Certificate

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C324S765010, C324S763010

Reexamination Certificate

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06917208

ABSTRACT:
A method for determining resistances at a plurality of interconnected resistors in an integrated circuit and a resistor configuration in which the resistors are interconnected to form a ring structure. Two measurement pads are in each case provided at the nodes between two resistors. The measurement pads can be used for feeding in current and for measuring voltage according to the known four-point measurement method. The effect of the ring structure is that fewer measurement pads are required, in contrast to the customary series circuit of resistors. By way of example, in the case of a ring structure with four resistors, two measurement pads are advantageously saved. The consequently reduced chip area required for the ring structure is advantageous particularly in the case of test circuits, which can be arranged for example in the narrow sawing frame between two chips.

REFERENCES:
patent: 4347479 (1982-08-01), Cullet
patent: 4651086 (1987-03-01), Domenichini et al.
patent: 5140276 (1992-08-01), Fisher
patent: 5457402 (1995-10-01), Sato
patent: 5627101 (1997-05-01), Lin et al.
patent: 36 15 550 (1987-11-01), None
patent: 100 12 313 (2001-09-01), None

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