Method and system of providing power to a pressure and...

Measuring and testing – Fluid pressure gauge – Diaphragm

Reexamination Certificate

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Details

C073S725000, C073S727000, C073S719000

Reexamination Certificate

active

11272306

ABSTRACT:
A method and system of providing power to a pressure and temperature sensing element is provided. Polarity switching is added to a current source for a sensor, which includes one piezo-resistive sensing element configured as a single implant square located at an edge of a diaphragm of the element, and which produces pressure and temperature outputs. The piezo-sensing element operates as a piezo-resistive radial element when current is conducted through the element radially with respect to the diaphragm. Conversely, the piezo-sensing element operates as a piezo-resistive tangential element when current is conducted through the element tangentially to the edge of the diaphragm. A difference in the radial and tangential resistances is proportional to an applied pressure, while a sum of the resistances is a function of temperature. By alternating the polarity of power applied to the sensor, a build up of ions resulting from PUD is minimized.

REFERENCES:
patent: 4399707 (1983-08-01), Wamstad
patent: 4539843 (1985-09-01), Wise
patent: 6065346 (2000-05-01), Voegele
patent: 6510742 (2003-01-01), Johnson

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