Method and system of monitoring manufacturing equipment

Details Method and system of monitoring manufacturing equipment Method and system of monitoring manufacturing equipment

2011-08-30

2011-08-30

Decady, Albert (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C073S714000, C073S426000, C373S031000, C373S032000, C216S037000

Reexamination Certificate

active

08010225

ABSTRACT:
A method and system is provided for monitoring manufacturing equipment and, more particularly, for monitoring manufacturing equipment in a semiconductor fabrication facility using existing tool elements. The method includes operating a tool working at an operating mode such that at least one of its control parameters is outside of a normal operating range, and measuring the at least on of the control parameters of the tool working at the operating mode outside of the normal operating range. The method further includes detecting a change to a condition of the tool based on the measuring of the at least one control parameter.

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