Method and system of dynamic learning through a...

Details Method and system of dynamic learning through a... Method and system of dynamic learning through a...

2005-11-01

2005-11-01

Tsai, Carol S. W. (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Measured signal processing

C702S179000, C702S066000, C702S067000, C702S193000

Reexamination Certificate

active

06961679

ABSTRACT:
The present invention relates to a method and system for efficiently determining grating profiles using dynamic learning in a library generation process. The present invention also relates to a method and system for searching and matching trial grating profiles to determine shape, profile, and spectrum data information associated with an actual grating profile.

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