Method and system of controlling dummy dispense

Details Method and system of controlling dummy dispense Method and system of controlling dummy dispense

2008-01-29

2008-01-29

Bashore, Alain L. (Department: 1762)

Coating processes

Measuring, testing, or indicating

C427S425000, C427S162000, C427S240000, C118S715000

Reexamination Certificate

active

07323212

ABSTRACT:
A dummy dispense of liquid is controlled by recording a time at which a substrate is processed; recording a time at which a liquid is dispensed; comparing the time at which the substrate is processed and the time at which the liquid is dispensed to generate a dummy dispense signal when a dummy dispense is required. A system for controlling dummy dispense of liquid includes at least one information storage device storing a time at which a substrate is processed and a time at which a liquid is dispensed. At least one processor compares the time at which the substrate is processed and the time at which the liquid is dispensed to determine whether a dummy dispense is required.

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