Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Involving measuring – analyzing – or testing
Reexamination Certificate
2005-03-15
2005-03-15
Ryan, Patrick (Department: 1745)
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Involving measuring, analyzing, or testing
C205S645000, C204S22400M, C204S22400M, C204S297050
Reexamination Certificate
active
06866763
ABSTRACT:
The present invention provides method of adjusting a thickness profile of a top metal layer of a workpiece using a processing solution. A thickness profile control member is included that has at least first and second regions that will allow for processing at respective first and second rates that are different from each other. When processing the workpiece, the processing system establishes relative lateral movement between the workpiece and the thickness profile control member so that a certain portion of the workpiece is disposed in locations that correspond to the first and second regions at different points in time during the processing. In a preferred aspect, the lateral movement is controlled as a result of data obtained from sensors relating to the thickness of a removed or deposited layer.
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Basol Bulent M.
Uzoh Cyprian E.
ASM NuTool. Inc.
Knobbe, Martens, Olson-Bear LLP
Parsons Thomas H.
Ryan Patrick
LandOfFree
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