Method and system for triangulation-based, 3-D imaging utilizing

Details Method and system for triangulation-based, 3-D imaging utilizing Method and system for triangulation-based, 3-D imaging utilizing

1997-03-27

1998-09-29

Font, Frank G.

Optics: measuring and testing

By polarized light examination

With light attenuation

G01B 1124

Patent

active

058152750

ABSTRACT:
A method and system for three-dimensional imaging of objects, including integrated circuit interconnections and many other microelectronic assemblies and miniature parts, is used to greatly improve the efficiency of triangulation-based laser line scanning systems. A scanning beam is incident at a normal angle to the X,Y inspection plane with the scan line oriented at 45.degree., diagonal to an axis defining a first direction of motion. Motion of the imaging head along the axis is used to acquire line scan images in the non-orthogonal coordinate system having symmetry about the orthogonal axes of motion.

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