Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate
2007-10-30
2007-10-30
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
Dimension
Thickness
C356S237200
Reexamination Certificate
active
11389297
ABSTRACT:
A method and system are presented for optical measurements in multi-layer structures to determine the properties of at least some of the layers. The structure is patterned by removing layer materials within a measurement site of the structure from the top layer to the lowermost layer of interests. Optical measurements are sequentially applied to the layers, by illuminating a measurement area in the layer under measurements, when the layer material above said layer under measurements is removed, thereby obtaining measured data portions for the at least some of the layers, respectively. The properties of each of the at least some layers are calculated, by analyzing the measured data portion of the lowermost layer, and then sequentially interpreting the measured data portions of all the other layers towards the uppermost layer, while utilizing for each layer the calculation results of the one or more underlying layers.
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Browdy and Neimark PLLC
Lauchman Layla G.
Nova Measuring Instruments Ltd.
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