Method and system for teaching reference position of...

Details Method and system for teaching reference position of... Method and system for teaching reference position of...

2011-04-26

2011-04-26

Decady, Albert (Department: 2121)

Data processing: generic control systems or specific application

Generic control system, apparatus or process

Digital positioning

C700S056000, C700S121000, C700S213000

Reexamination Certificate

active

07933665

ABSTRACT:
In order to automate the positioning at respective ports at the start-up of an equipment in a semiconductor manufacturing equipment equipped with a positioning device and a carrying robot and enhance productivity, 2 points W1and W2at which the circumference of a disc-like object47such as a wafer and the locus43of a detection means cross are detected, and the center position A of a disc-like object is calculated using the specific point O on the perpendicular bisector42of the section of a line combining 2 points with these and the radius r of the disc-like object. Thereby, the carrying robot could carry out the positioning work and not only the correction of a carrying route but also the reference position teaching at the start-up of equipment could be automated using the result.

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