Method and system for surface contouring

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364525, 356376, 356375, G01B 1124

Patent

active

042120730

ABSTRACT:
A method and system for surface contouring including: projecting a sinusoidal pattern on a surface to be tested; shifting the pattern in three steps at one-quarter period intervals of the sinusoidal pattern; sensing the intensity of the radiation from the test surface through a mask containing the same sinusoidal pattern at at least one position of the surface at each of the steps; storing the intensity sensed at each position at each step; for each of the positions adding the intensity of the first and third steps to produce a d.c. spatial frequency amplitude, subtracting the intensity of the third step from that of the first to obtain the cosinusoidal spatial frequency amplitude, and subtracting the intensity of the second step from the d.c. amplitude to produce the sinusoidal spatial frequency amplitude; combining the sinusoidal and cosinusoidal amplitudes to produce a trigonometric function of the phase angle of the projected sinusoidal pattern on the test surface and generating from the trigonometric function of the phase angle an output representative of the height of the surface at each position.

REFERENCES:
patent: 3828126 (1974-08-01), Ramsey, Jr.
patent: 3866052 (1975-02-01), Dimatteo et al.
patent: 3967114 (1976-06-01), Cornillault
patent: 4088408 (1978-05-01), Burcher et al.
patent: 4139304 (1979-02-01), Redman et al.
patent: 4145991 (1979-03-01), Dimatteo et al.

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