Method and system for supplying semiconductor source material

Details Method and system for supplying semiconductor source material Method and system for supplying semiconductor source material

1998-04-29

2000-07-18

Jacyna, J. Casimer

Fluent material handling, with receiver or receiver coacting mea

Portable systems or track mounted supply means

141 1, 141 82, 141129, 222 1, 2221462, 222152, 222160, 222608, 2226111, B65B 104

Patent

active

060892854

ABSTRACT:
A method of supplying source material in a crystal puller used to grow single crystal semiconductor material. Generally, the method includes receiving a bulk container of the source material at a facility having the crystal puller and configuring the bulk container for gravity feed of the source material from the container. The bulk container is transported to the crystal puller and a predetermined quantity of source material is dispensed directly from the bulk container into the crystal puller. Apparatus and a system for use in supplying source material are also disclosed.

REFERENCES:
patent: 5141387 (1992-08-01), Smith
patent: 5474111 (1995-12-01), Williamson et al.
patent: 5855232 (1999-01-01), Oda et al.
patent: 5950693 (1999-09-01), Noah et al.
International Search Report, PCT/US99/04697, dated Jun. 11, 1999, pp. 1-3.

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