Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2005-07-26
2005-07-26
Chen, Bret (Department: 1762)
Coating processes
Coating by vapor, gas, or smoke
C427S255500, C427S569000
Reexamination Certificate
active
06921555
ABSTRACT:
An apparatus and method for sequential and isolated processing of a workpiece comprises a two compartment chamber and a mechanism to transfer the workpiece from a first compartment to a second compartment by rotating the workpiece on a workpiece mover through an internal pathway. The transfer mechanism comprises two doors coupled to the workpiece mover to seal the internal pathway between the first and second compartments so that the two compartments are isolated and the workpiece can be processed sequentially and in isolation. The apparatus further comprises components to enable the processing of a workpiece. The preferred method of processing a workpiece is to deposit or adsorb a thin layer in the first compartment and then transfer by rotating the workpiece on the workpiece mover to the second compartment for further processing. The workpiece can then be transferred once again to the first compartment for further processing, and again to the second compartment, repeating the processing and transferring steps until a desired thin film is achieved.
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PCT Written Opinion mailed Jan. 18, 2000, International Application No. PCT/US99/11453, International Filing Date May 25, 1999.
Bercaw Craig Alan
Nguyen Tai Dung
Nguyen Tue
Chen Bret
Fliesler Meyer
Tegal Corporation
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