Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1998-11-17
2000-06-20
Font, Frank G.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
237337, 237376, 237445, G01D 328
Patent
active
060783915
ABSTRACT:
A system and method for characterizing a surface are disclosed. The system includes a light source and source optics which direct a beam of light toward the surface. A first optical integrating device is positioned and configured to receive a first portion of the scattered light and a second optical integrating device is positioned and configured to receive a second portion of the scattered light. The second optical integrating device reflects the second portion of the scattered light through a segmenting optic. The segmenting optic is configured to segment the second portion of the scattered light to thereby isolate the anisotropic roughness amplitude to one or more segments. A roughness ratio indicative of the anisotropic roughness is produced by comparing the roughness amplitudes of the segments.
REFERENCES:
patent: 5625451 (1997-04-01), Schiff et al.
Font Frank G.
Ratliff Reginald A.
Schmitt Measurement Systems, Inc.
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