Data processing: structural design – modeling – simulation – and em – Simulating nonelectrical device or system
Reexamination Certificate
2011-03-15
2011-03-15
Shah, Kamini S (Department: 2128)
Data processing: structural design, modeling, simulation, and em
Simulating nonelectrical device or system
C703S013000, C700S100000
Reexamination Certificate
active
07908127
ABSTRACT:
By simulating a manufacturing environment on the basis of appropriate simulation models, a schedule may be established in which process restrictions, tool availability and product entity status are automatically taken into consideration. Moreover, by estimating the process flow efficiency provided by a simulated time progression of the process flow in the environment, an optimized schedule may be established, which may be accomplished by identifying less efficient product entities and re-scheduling one or more product entities in order to obtain an enhanced process flow efficiency. The technique of the present invention may be advantageously applied to the processing of advanced mass products requiring sophisticated process tools and process sequences, such as the processing of semiconductor devices.
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Herrmann Arndt
Ringel Robert
Weigang Joerg
Day Herng-Der
GlobalFoundries Inc.
Shah Kamini S
Williams Morgan & Amerson
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