Method and system for removing empty carriers from process...

Details Method and system for removing empty carriers from process... Method and system for removing empty carriers from process...

2011-07-05

2011-07-05

Barnes-Bullock, Crystal J (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S102000, C700S105000, C700S121000, C700S217000, C700S218000, C414S222020, C414S222070, C414S222090, C414S222130, C414S935000

Reexamination Certificate

active

07974726

ABSTRACT:
By providing an under-specified specification for designating a destination carrier in a respective control job or control message, a high degree of flexibility in determining the destination of processed substrates may be obtained, thereby also allowing the removal of a source carrier for enhancing load port availability in complex semiconductor facilities.

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Letter from foreign associate mailed May 13, 2008.
Translation of Official Communication issued Mar. 18, 2008.

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