Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent
1991-12-24
1994-07-12
Pal, Asok
Cleaning and liquid contact with solids
Processes
Using solid work treating agents
134 1, B08B 700
Patent
active
053285174
ABSTRACT:
A method is provided for removing material from a structure having at least one layer of material formed on a substrate. The method includes the steps of irradiating a target area of a structure with radiant energy sufficient to break or weaken chemical bonds in the material, and impinging the target area with a particle stream to remove the pyrolyzed material from the structure. The method may be implemented by a system comprising a housing having a window; a radiant energy source mounted in the housing for irradiating the target area of the structure with the radiant energy; and a nozzle mounted to the exterior of the housing for directing the stream of particles at the target area.
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Pal Asok
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